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FRT MicroProf® - The Instruments | |
| The MicroProf® (Standard Version) | |
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This instrument offers the greatest flexibility and highest accuracy of all MicroProf® instruments. When the optical sensor CHR 150 is applied, the sample is illuminated by a focused white light. A passive optics with large chromatic aberration divides the white light vertically into various focus points of different colors, meaning different heights. A miniaturized spectrometer detects the color of the reflected light and determines the position of the focus point, and consequently the position of the sample by means of a calibration table. |
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| The MicroProf® Autofocus | |
| This device allows the rapid and non-contact measurement of contour, roughness and topography. With the autofocus method, the focal point of a laser beam follows the surface and measures the sample’s structure with a high resolution. Thanks to its vertical measuring range of 1.5 mm and a working distance of 5.6 mm, the MicroProf® Autofocus is suitable for a large range of applications. | |
| The MicroProf® Junior | |
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Do you wish to analyze surfaces with larger structured heights and is a lateral resolution of roughly 30 µm sufficient, you can then apply the MicroProf® Junior. This sensor operates according to the principle of optical triangulation. In the optical triangulation, the working distance from sample to sensor is determined via the angle of the reflected light ray. Thanks to the application of two detectors (double triangulation) fixed symmetrically to the light source the edge error which usually occurs is widely compensated. |
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The MicroProf® Junior is the low-cost version of the MicroProf® line and is particularly suitable for rapid surface measurements with lower resolution.
Figure right: Measurement of a road surface with the MicroProf® Junior |
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| The MicroProf® Film thickness | |
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The MicroProf® with film thickness sensor does not measure the surface topography of a sample or a part, but allows the non-contact thickness investigation of transparent films. The data acquisition can be carried out as usual point by point as profile or as 3D measuring field. It allows the investigations of e.g. films, lacquers, adhesive films, plastic coatings and liquid films. Photoresist from the semiconductor industry in particular can be problem-free measured under amber/yellow light. |
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전화 : 02 - 3411- 0173 팩스 : 02 - 3411 - 0178
2001-2005 Hanmi
Industries Ltd. All rights reserved |
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