MicroProf^®

MicroProf^®

Autofocus

MicroProf^®

Junior

MicroProf^®

Film thickness

Measuring features

Roughness / Contur /

Topography

Roughness / Contur /

Topography

Roughness / Contur /

Topography

film thickness of

transparent films

Min. Measuring range XY축

200 µm x 200 µm

400 µm x 400 µm

400 µm x 400 µm

200 µm x 200 µm

Max. Measuring range XY축

100 mm x 100 mm

200 mm x 200 mm

300 mm x 300 mm

100 mm x 100 mm

200 mm x 200 mm

300 mm x 300 mm

100 mm x 100 mm

200 mm x 200 mm

300 mm x 300 mm

100 mm x 100 mm

200 mm x 200 mm

300 mm x 300 mm

Measuring range Z축

approx.300 µm (3 mm*) or approx.700 µm (10 mm*)

approx.1,5 mm

approx. 3 mm

approx. 2-200 µm 

(for n=1; else z/n)

Accuracy Z, local

± 0.1 µm (ca. ± 1 µm)

± 0.3 µm (ca. ± 10 µm)

< ± 1 µm, typ. ± 0.3 µm

± 3 µm

< ± 0.1 µm

Vertical Resolution

approx. 50 nm

approx. 50 nm

approx. 50 nm

approx. 300 nm

approx. 10 nm 

(point measurement)

Lateral Resolution

1-2 µm 

approx. 10 µm

approx. 3 µm

approx. 10-30 µm

approx. 20-200 µm

Working Distance

ca. 5 mm

approx. 13 mm

approx. 5.6 mm

approx. 15 mm

approx. 30 mm

Max. measuring Frequency

1000 Hz

10.000 Hz

1000 Hz

300 Hz

Closed loop of sensor

not necessary

not necessary

not necessary

not necessary

Camera

yes

yes

yes

yes

Light source

White light

(Halogen lamp)

Laser I

Laser IIIb

White light

(Halogen lamp)

Thread angle

ca. 30°

ca. 10°

approx. 20°

approx. 20-30°

< 5°