Home

[Hanmi Industries Ltd.][Topography][frt][Micro Glider]

           ¸ðµ¨ Micro Glider    

 

ÀÌ Á¦Ç°Àº ºñÁ¢ÃË½Ä ºñÆÄ±«¿¡ ÀÇÇÑ Ç¥¸éÃøÁ¤¹æ½ÄÀÎ µÎ°¡Áö ¼¾¼­¸¦ »ç¿ëÇϰí,

 

¿©±â¿¡´Â Optical sensorÀÇ ÀåÁ¡À» ÀÌ¿ëÇÏ¿©, ±¤¹üÀ§ÇÑ ÃøÁ¤°Å¸®¸¦ ½Å¼ÓÇÑ µ¥ÀÌÅÍÃøÁ¤ÀÌ µÇµµ·Ï Çϸç,Acoustic near-field sensor¸¦ ÀÌ¿ëÇÏ¿© optical sensorÀÇ È¾ÃàºÐÇØ´ÉÀÌ ÃæºÐÇÏÁö ¾ÊÀº °÷À̳ª, Scanning probe microscope¼¾¼­¸¦ »ç¿ëÇÏ¿© ÃøÁ¤¹üÀ§°¡ ¾ÆÁÖ ÀÛÀº ¹Ì¼¼ÇÑ °÷¿¡ »ç¿ë¼ö ÀÖ´Ù.

 

À̹ۿ¡ Nano Hardness/Transparancy film thickness/AFM µî ´Ù¾çÇÑ ¼¾¼­¸¦ Àû¿ëÇÏ¿© Àç·áÀÇ Æ¯¼º ½ÃÇèÀ» ÇÑ °èÃø±â¿¡¼­ ÇÒ ¼ö ÀÖ´Ù.

  

¾Æ·¡ MicroGlider¿¡ »ç¿ëµÈ ¼¾¼­¸¦ Ŭ¸¯ÇϽøé,´Ù¾çÇϰÔ

Àû¿ë°¡´ÉÇÑ ¼¾¼­µé¿¡ ´ëÇÑ ¼³¸íÀÌ ÀÖÀ½.

¿ÞÂʱ׸²: MicroGlider® with acoustical near field-sensor

  
 

MicroGlider® ¿¡

 »ç¿ëµÈ ´Ù¾çÇÑ ¼¾¼­ anired01_squish_next.gif

 MicroGlider®
      
ÀÇ
AFMÀÇ Àû¿ë anired01_squish_next.gif

     MicroGlider®
        
 È®ÀåµÈ ZÃàanired01_squish_next.gif

Á¦Ç°¸í Micro Glider

Á¦Ç°Á¤º¸

 ÀÌ Á¦Ç°Àº FRT»çÀÇ °¡Àå powerfulÇÑ ÃøÁ¤°èÃø±âÀ̸ç, ¸ðµç Á¾·ùÀÇ Ç¥¸é¿¡ ¸¸´ÉÀ¸·Î ÃøÁ¤ÇϱâÀ§ÇØ

°³¹ßµÈ Àåºñ·Î¼­, Ç¥¸éÀÇ Á¶µµ,Çü»ó,ÅäÆ÷±×¶óÇÇ ÃøÁ¤¿¡ Àû¿ëÇÒ ¼ö ÀÖ´Ù.

µ¥ÀÌÅÍ´Â 2Â÷¿ø/3Â÷¿ø ÃøÁ¤À» À§ÇÏ¿©, line profile·Î¼­ ÀúÀåµÇ¾îÁö¸ç, µ¥ÀÌÅÍ´Â µµ·®ÇÐÀû ¹× ±Ù¿øÀ»

ÀúÀåÇÑ´Ù.

 

Air bearingÀ» »ç¿ëÇÏ¿©, MicroGlider´Â ¾î¶°ÇÑ º¸Á¶Àåºñ ¾øÀÌ,Ultra-flat surface(ÃÊÆòź Ç¥¸é)À» Á¤¹ÐÇϰí

¾ÈÁ¤ÀûÀ¸·Î ÃøÁ¤ÇÑ´Ù. ÃøÁ¤ xyÃà¹üÀ§´Â ¼±Åÿ¡ µû¶ó ´Þ¶óÁö¸ç, ÃÖ´ë 600mm x 600mm±îÁö ÀÌ´Ù.

Ưº°È÷ ÀÌ ÀåºñÀÇ È®ÀåµÈ ÃøÁ¤ ¹üÀ§´Â  ¼±Åûç¾çÀÎ Scanning probe microscope¿Í º¹ÇÕÀûÀ¸·Î »ç¿ëµÇ´Â °÷¿¡ °­·ÂÇÑ ±â´ÉÀ» ¹ßÈÖÇϸç, ÀÌ °æ¿ì ÃøÁ¤¹üÀ§´Ânano meterºÐÇØ´ÉÀ¸·Î µm ~ ¼ö¹émm±îÁö ÇѰèÃø±â¿¡¼­ °­·ÂÈ÷ ¼öÇàµÇ¾îÁø´Ù.

 

The MicroGlider® Àº Optical sensor CHR 150À» ±âº»À¸·Î Àû¿ëÇϸç, Çʿ信 µû¶ó, Acoustical near-field sensor¸¦ ÇÔ²² »ç¿ëÇÑ´Ù.

 

Ç¥¸éÃøÁ¤Àº ÀϹÝÀûÀ¸·Î ¿ÏÀüÇÑ»óÅÂ·Î ÃøÁ¤ÇϱâÀ§ÇØ, ¿©·¯ °¡Áö ´Ù¸¥ ¹æ½ÄÀ» Àû¿ëÇÏ¿©¾ß ÇÑ´Ù.

Áö±Ý±îÁö,°í°´ÀÇ ÀÔÀå¿¡¼­ »õ·Î¿î ÃøÁ¤¹æ½ÄÀÌ À¯ÇàÇÏ¸é »õ·Î¿î °èÃø±â¸¦ ±¸¸ÅÇÏ´Â  ºÒÇÊ¿äÇÑ ºÎÀÛ¿ëÀÌ ÀÖ¾î¿Ô´Ù. ±×·¯³ª, ÀÌ Àåºñ´Â ´ÜÁö ÇÊ¿äÇÑ ¼¾¼­¸¸ ¹Ù²ÞÀ¸·Î¼­, °è¼ÓÀûÀ¸·Î ÇÑ °èÃø±â¿¡ ÀÇÇÏ¿© ´Ù¸¥ ¹æ½ÄÀÇ ÃøÁ¤ ¾÷¹« ¹× ´Ù¾çÇÑ Àç·áÀÇ Ç¥¸éÀ» ¼¾¼­¸¦ ºÎ°¡ÇÔÀ¸·Î ¿Ïº®È÷ ÃøÁ¤ÇÒ ¼ö ÀÖµµ·Ï ÇÑ È¹±âÀûÀÎ ÀåºñÀÓ.

Fig. left: microstructurized part of the  Bartels Mikrotechnik GmbH

Thanks to an optional universal interface with a 16-Bit AD-board even user-supplied sensors may be connected to the instrument. Control and evaluation are carried out via the standard software.

The MicroGlider® ´Â °­·ÂÇÑ ÃøÁ¤Á¦¾î/Ç¥¸éºÐ¼® ¼ÒÇÁ¿þ¾îÀÎ FRT Mark III ¸¦ Á¦°øÇÔ.

xy-Table

Sensor

Software

Equipment

Type air-bearing

Encoder linear encoder

Range 100 x 100 mm²,

200 x 200 mm²

350 x 350 mm² or

600 x 600 mm²

Type CHR 150 or

acous. near-field sensor 

Optional div. sensors of FRT

custom build sensors

Measurement Acquire (G/E)

Analysis Mark III (G/E)

 

Complete instrument

industrial PC(Windows)

software manual (G/E)

[ÀÌÀü][´ÙÀ½]

 Çѹ̻ê¾÷ 

ÀüÈ­ :  02 - 3411- 0173    ÆÑ½º :  02 - 3411 - 0178 

sales@gohanmi.com

2001-2005 Hanmi Industries Ltd. All rights reserved
sales@gohanmi.com