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¸ðµ¨ Micro Glider |
ÀÌ Á¦Ç°Àº ºñÁ¢ÃË½Ä ºñÆÄ±«¿¡ ÀÇÇÑ Ç¥¸éÃøÁ¤¹æ½ÄÀÎ µÎ°¡Áö ¼¾¼¸¦ »ç¿ëÇϰí,
¿©±â¿¡´Â Optical sensorÀÇ ÀåÁ¡À» ÀÌ¿ëÇÏ¿©, ±¤¹üÀ§ÇÑ ÃøÁ¤°Å¸®¸¦ ½Å¼ÓÇÑ µ¥ÀÌÅÍÃøÁ¤ÀÌ µÇµµ·Ï Çϸç,Acoustic near-field sensor¸¦ ÀÌ¿ëÇÏ¿© optical sensorÀÇ È¾ÃàºÐÇØ´ÉÀÌ ÃæºÐÇÏÁö ¾ÊÀº °÷À̳ª, Scanning probe microscope¼¾¼¸¦ »ç¿ëÇÏ¿© ÃøÁ¤¹üÀ§°¡ ¾ÆÁÖ ÀÛÀº ¹Ì¼¼ÇÑ °÷¿¡ »ç¿ë¼ö ÀÖ´Ù.
À̹ۿ¡ Nano Hardness/Transparancy film thickness/AFM µî ´Ù¾çÇÑ ¼¾¼¸¦ Àû¿ëÇÏ¿© Àç·áÀÇ Æ¯¼º ½ÃÇèÀ» ÇÑ °èÃø±â¿¡¼ ÇÒ ¼ö ÀÖ´Ù.
¾Æ·¡ MicroGlider¿¡ »ç¿ëµÈ ¼¾¼¸¦ Ŭ¸¯ÇϽøé,´Ù¾çÇÏ°Ô Àû¿ë°¡´ÉÇÑ ¼¾¼µé¿¡ ´ëÇÑ ¼³¸íÀÌ ÀÖÀ½. ¿ÞÂʱ׸²: MicroGlider® with acoustical near field-sensor |
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ÀÌ Á¦Ç°Àº FRT»çÀÇ °¡Àå powerfulÇÑ ÃøÁ¤°èÃø±âÀ̸ç, ¸ðµç Á¾·ùÀÇ Ç¥¸é¿¡ ¸¸´ÉÀ¸·Î ÃøÁ¤ÇϱâÀ§ÇØ °³¹ßµÈ Àåºñ·Î¼, Ç¥¸éÀÇ Á¶µµ,Çü»ó,ÅäÆ÷±×¶óÇÇ ÃøÁ¤¿¡ Àû¿ëÇÒ ¼ö ÀÖ´Ù. µ¥ÀÌÅÍ´Â 2Â÷¿ø/3Â÷¿ø ÃøÁ¤À» À§ÇÏ¿©, line profile·Î¼ ÀúÀåµÇ¾îÁö¸ç, µ¥ÀÌÅÍ´Â µµ·®ÇÐÀû ¹× ±Ù¿øÀ» ÀúÀåÇÑ´Ù.
Air bearingÀ» »ç¿ëÇÏ¿©, MicroGlider´Â ¾î¶°ÇÑ º¸Á¶Àåºñ ¾øÀÌ,Ultra-flat surface(ÃÊÆòź Ç¥¸é)À» Á¤¹ÐÇÏ°í ¾ÈÁ¤ÀûÀ¸·Î ÃøÁ¤ÇÑ´Ù. ÃøÁ¤ xyÃà¹üÀ§´Â ¼±Åÿ¡ µû¶ó ´Þ¶óÁö¸ç, ÃÖ´ë 600mm x 600mm±îÁö ÀÌ´Ù. Ưº°È÷ ÀÌ ÀåºñÀÇ È®ÀåµÈ ÃøÁ¤ ¹üÀ§´Â ¼±Åûç¾çÀÎ Scanning probe microscope¿Í º¹ÇÕÀûÀ¸·Î »ç¿ëµÇ´Â °÷¿¡ °·ÂÇÑ ±â´ÉÀ» ¹ßÈÖÇϸç, ÀÌ °æ¿ì ÃøÁ¤¹üÀ§´Ânano meterºÐÇØ´ÉÀ¸·Î µm ~ ¼ö¹émm±îÁö ÇѰèÃø±â¿¡¼ °·ÂÈ÷ ¼öÇàµÇ¾îÁø´Ù.
The MicroGlider® Àº Optical sensor CHR 150À» ±âº»À¸·Î Àû¿ëÇϸç, Çʿ信 µû¶ó, Acoustical near-field sensor¸¦ ÇÔ²² »ç¿ëÇÑ´Ù.
Ç¥¸éÃøÁ¤Àº ÀϹÝÀûÀ¸·Î ¿ÏÀüÇÑ»óÅÂ·Î ÃøÁ¤ÇϱâÀ§ÇØ, ¿©·¯ °¡Áö ´Ù¸¥ ¹æ½ÄÀ» Àû¿ëÇÏ¿©¾ß ÇÑ´Ù. Áö±Ý±îÁö,°í°´ÀÇ ÀÔÀå¿¡¼ »õ·Î¿î ÃøÁ¤¹æ½ÄÀÌ À¯ÇàÇÏ¸é »õ·Î¿î °èÃø±â¸¦ ±¸¸ÅÇÏ´Â ºÒÇÊ¿äÇÑ ºÎÀÛ¿ëÀÌ ÀÖ¾î¿Ô´Ù. ±×·¯³ª, ÀÌ Àåºñ´Â ´ÜÁö ÇÊ¿äÇÑ ¼¾¼¸¸ ¹Ù²ÞÀ¸·Î¼, °è¼ÓÀûÀ¸·Î ÇÑ °èÃø±â¿¡ ÀÇÇÏ¿© ´Ù¸¥ ¹æ½ÄÀÇ ÃøÁ¤ ¾÷¹« ¹× ´Ù¾çÇÑ Àç·áÀÇ Ç¥¸éÀ» ¼¾¼¸¦ ºÎ°¡ÇÔÀ¸·Î ¿Ïº®È÷ ÃøÁ¤ÇÒ ¼ö ÀÖµµ·Ï ÇÑ È¹±âÀûÀÎ ÀåºñÀÓ.
Thanks to an optional universal interface with a 16-Bit AD-board even user-supplied sensors may be connected to the instrument. Control and evaluation are carried out via the standard software. The MicroGlider® ´Â °·ÂÇÑ ÃøÁ¤Á¦¾î/Ç¥¸éºÐ¼® ¼ÒÇÁ¿þ¾îÀÎ FRT Mark III ¸¦ Á¦°øÇÔ.
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ÀüÈ : 02 - 3411- 0173 ÆÑ½º : 02 - 3411 - 0178
2001-2005
Hanmi Industries Ltd. All rights reserved |
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