WLI-TRIRCI

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모델 TRIRCI

Short Coherence Transmitted Light Interferometer for theThickness Measurement of Si Membranes

전자동, 웨이퍼 혹은 측정대상물의 자동 시편 장착->측정->분석.

1.웨이퍼 두께 측정기(TTV=Total Thickness Variation)

2.Si Membrance, MEMS, Transparent Thin Materials의 두께 측정기

3.Roughness/Flatness/Waviness/Saw Mark/연마결/WARPAGE/표면 결함 등 측정,

4.옵션, 표면의 2차원 3차원 측정

모델 TRIRCI 웨이퍼두께측정기

-Technical Data-

1.Thickness resolution [µm] < 0.01

2.Probing footprint approx. [µm] 150 (smaller on request)

3.Thickness range, approx. [µm] 5 - 600

4.Dimensions, approx. [mm] 320 x 320 x 380

5.Weight [kg] 120

6.Wafer fixture acc. to customer’s requirements upto 8” Fully automated measurement, Standard or customized software package

The TRIRCI is a measurement device for non contact thickness measurement of Si beams. It lends itself for the

use in the laboratory, work shop and the quality assurance in a production line.

The measurement head offers unparalleled repeatability and has a robust and compact design. It is maintenance

free and therefore suitable for an in-line process.

The thickness of Si membranes is determined within a few seconds and an automated procedure allows easy checking

of whole wafers.

The TRIRCI is capable to cover a wide range of thickness values, starting from 200 nm up to almost 1mm using a footprint

of the probing beam of approximately 150µm. The instrument employs a unique infrared measurement technique different from

the ordinary white light interferometers. No use is made from light beams reflected from the sample surfaces. This ensures

a very high stability and repeatability of the measurement data.

The motorized stages allow measuring the thickness profile along a silicon beam. One can measure etched individual

silicon beams or membranes on a wafer on a statistical basis. To this end measurement locations are defined in a table.

They can be entered using X, Y coordinates or under visual control with the help of the integrated camera. As an option

one can also measure the lateral dimensions of a silicon beam.

The measurement system comprises of the optical measurement head, a stable granite stand with X and Y motorised stages,

the wafer holder, a PC and the customised software. It runs under Windows XP

전화 : 02 - 3411- 0173 팩스 : 02 - 3411 - 0178