|
전화
: 02 - 3411 -
0173
|
Autofocus Laser타입-3차원 비접촉식 표면 형상측정기
(Roughness/Contour/Topography), UBM사의 창업자 Dr. Breitmeir의 기술 |
||||||||||||||||||||||||||||||
|
|
| ||||||||||||||||||||||||||||||
|
| |||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||
|
1. XY축 측정범위(mm) |
50 x 50, 100 x 100 ~1,000x 1,000(option) |
|
2. 횡축 분해능(µm) |
0.5 (Laser Spot Diameter) |
|
3. Stand Off(촛점거리,mm) |
Approx 2 |
|
4. Z축 측정범위(mm) |
1[+/-50µm, +/-500µm], Motorized Z-Stage" up to 50mm(option) |
|
5. Z축 분해능(nano meter) |
10(normal)/ 1(max) |
|
6. Accuracy of Resolution |
0.005~0.01% of Measurment Range |
|
7. 측정속도 |
Up to 40mm/sec, Normal 5~10mm/sec |
|
8. Data획득 속도(Hz) |
10~10,000(depends on object surface) |
|
9. Easy Positoining |
Object field visible using a microscope attachment(option) |
|
11.Aperture Angle[°] |
approx. 60 |
|
12.Wavelenth of laser beam |
635 nm |
|
13.Power(mW) |
approx. 1 |
|
14.System Dimension |
Table: 160 x 130 x 75 cm Weight: approx. 400 kg Power: 120/240 V, 50/60 Hz, 500 |
|
15.측정요소 |
A. All Roughness Parameters B. Waveness C.Filtering D. Zoom E. FFT, Correlation F. R& W Form G. 2D, 3D H. Linear Regression
|
|
16.확장가능요소 |
Flatness, Film Thickness,Vibration Radius,/Sphere and ETC Optional sensor such as Stylus, Confocal, WLI(White Light Interferrometer) can be mounted to this system
|

전화 : 02 - 3411- 0173 팩스 : 02 - 3411 - 0178
![]()
2001-2005
Hanmi Industries Ltd. All rights reserved
sales@gohanmi.com