Confocal microscope head

Standard version comes with objective 50x/0.8:

Area scanning confocal sensor with micro-lens disk
Light source	LED
Lifetime	> 50.000 h
Meas. range with stepping motor	50 mm
Meas. range with piezo actuator	100/150 µm
Vertical resolution, max.	5 nm
Lateral resolution, max.	1 µm
Stand off	0,66 mm
Measurement area	370 x 280 µm
Measuring time at 256 height steps	approx. 30s
Weight	approx. 12kg

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Measurement stages

Displacement XYZ, per axis	50 mm
Step size, min.	1 µm

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• Objectives
  3 objectives can be mounted in the objective turret which comes with the system

  Magnification/NA	Stand off	Meas. area, approx.	Resolution vertical	Resolution lateral
  20x/0,4	12 mm	900x700 µm	20 nm	3 µm
  50x/0,5	10.6mm	400x300 µm	17 nm	3 µm
  100x/0,8	3.3 mm	200x150 µm	10 nm	2 µm
  100x/0,95	0.31 mm	200x150 µm	5 nm	1 µm

• Customised fixtures for samples
• Workstation with vibration damping elements

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Software

• Windows XP operating system
• Measurement and evaluation software including the following features:
  Levelling, Zoom, Extraction of profile lines, spike elimination, filters, mathematical operations, FFT, ACF, 2D/3D roughness parameters, bearing area, slope and amplitude distribution, and more
• Customised algorithms