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¸ðµ¨ SMART SPM(Scanning Probe Microscope)
The world's the first 100% auotmated system The fastest and most advance SPM. Àü¼¼°è ÃÖÃÊ ÀüÀÚµ¿¼Â¾÷, °í¼ÓÃøÁ¤ ½ÇÇö!!!
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AFM(Atomic Force Microscope)
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¸ðµ¨ OmegaScope¢â 1000 |
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¼¼°èÃÖ°í·Î ºü¸£°í, ÀüÀÚµ¿ÀÇ Æí¸®ÇÑ AFM!!!
20³â ¸ð½ºÄÚ¹Ù¿¬±¸¼ÒÀÇ SPM±â¼ú°ú, Çõ¸íÀûÀÎ Scanner ±â¼ú·Î
AIST»ç°¡ ÃÖÁ¾Á¦Á¶¿Í ¿µ¾÷À» ¹Ì±¹¿¡¼ »õ·ÎÀÌ Ãâ¹ß ÇÕ´Ï´Ù.
¹Ì±¹(SPM Á¦Á¶¿µ¾÷,¼ºñ½ºÁö¿ø) + ¸ð½ºÄÚ¹Ù (20³â±â¼úÀÇ ¿¬±¸¼Ò) +
ÀϺ» (RAMAN SPECTROMETER Á¦Á¶°ø±Þ)
3°³±¹ ÇÕÀÛ °í¼ÓÃøÁ¤ ½Å±â¼úÀÇ AIST»çÀÇ AFM
AIST»ç ȨÆäÀÌÁö : (http://www.aist-nt.com/)--³î¶ó¿ïÁ¤µµÀÇ ºü¸¥ÃøÁ¤¼Óµµ µ¿¿µ»ó,
ÀüÀÚµ¿ÃøÁ¤ µ¿¿µ»ó,
´Ù¾çÇÑ
»ùÇÃÀÇ ÃøÁ¤À̹ÌÁö, ±â¼úÀÚ·á, īŸ·Î±×µî °Ë»ö °¡´ÉÇÕ´Ï´Ù.
1. ¸ðµ¨ SmartSPM : ¹Ì±¹Á¦Á¶¿µ¾÷(R&D¼¾ÅÍ ¸ð½ºÄÚ¹Ù)ÀÇ Global ±â¼úÇù·ÂÀÇ AIST-NT »çÀÇ AFM Ç¥¸é Çü»ó ¹× Ç¥¸éÀÇ ¹°¼º ÃøÁ¤, ÀÚ±âÀû,Àü±âÀû,¸¶ÂûƯ¼ºµîÀÇ ºÐ¼®ÀÌ ±âº»ÀûÀ¸·Î °¡´ÉÇÑ ÃøÁ¤ºÐ¼®±â·Î¼ »ùÇÃÀåÄ¡¿Í ÃøÁ¤½ÃÀÛÀü ¸ðµç ÀÛ¾÷À» ÀüÀÚµ¿¼Â¾÷, °í¼ÓÀÇ ÃøÁ¤¼Óµµ, ¿øÀÚ¹üÀ§~±¤¹üÀ§ÇÑ ÃøÁ¤¿µ¿ªÀÌ ±³Ã¼¾øÀÌ °¡´ÉÇÑ Çõ½ÅÀûÀÎ ½ºÄµ³Ê, Ź¿ùÇÑ ¹æÁø¼³°è·Î, ÇØ»óµµ¿Í À̹ÌÁö°¡ ¸Å¿ì ÁÁ½À´Ï´Ù. »ç¾ç;
Repeatability in XY: 0.1 nm(capacitance sensor on), 0.02 nm (capacitance sensor off) Repeatability in Z: better than 0.04 nm Scan speed: XY 7kHz, Z 15kHz(unloaded) Maximum scan range: 100 x 100 x 15 um (+/- 10 %) Maximum sample size: 40x 50 x 15mm(thickness) Motorized positioning range: 5 x 5 mm Positioning resolution: 1 um Ư¡°ú ÀåÁ¡(Ÿ°æÀï»ç¿Í ºñ±³)
;
1) ¸Å¿ìÆí¸®ÇÑ ÃøÁ¤Àü »ùÇà ÀüÀÚµ¿¼Â¾÷ ±â¼ú(ÀÛ¾÷ÀÚ°¡ ÃøÁ¤½ÃÀÛÀü±îÁö ¾Æ¹«°Íµµ ÇÒ °Í
¾ø½À´Ï´Ù.)
»ùÇÃÀ» ÀåÂøÇϰí, °£ÆíÇÏ°Ô Cantilever TipÀ» ÀåÂøÇϸé, ÀÚµ¿À¸·Î Cantilever
TipÀÇ ¿òÁ÷ÀÓÀÇ
³ô³·À̸¦ ÃøÁ¤ÇÏ´Â Laser¿Í Aligment¸¦ ÀÚµ¿À¸·Î ¸ÂÃß°í TipÀÇ »ùÇÃ
Approaching/LandingÀÛ¾÷ÀÌ
ÀüÀÚµ¿À¸·Î 1~2ºÐ³»¿¡ ÀÌ·ç¾îÁý´Ï´Ù. ÃøÁ¤¹× °á°ú¸¦ ÀÚµ¿À¸·Î
º¸¿©ÁÝ´Ï´Ù.
ÃøÁ¤½ÃÀÛÀü ÀÛ¾÷ÀÌ °æÀï Ÿ»ç AFM¿¡ ºñÇÏ¿© ¾à 5~10¹èÁ¤µµ ºü¸£°í ÆíÇÕ´Ï´Ù. ÀÛ¾÷ÀÚÀÇ ÁÖ°üÀûÀÎ
°æÇè¿¡
ÀÇÁ¸ÇÏÁö ¾Ê¾Æ ÃøÁ¤µ¥ÀÌÅÍÀÇ ¹Ýº¹ÀçÇö¼ºÀÌ ¿ì¼öÇÕ´Ï´Ù.
Ÿ°æÀï»çÀÇ °æ¿ì, Àüü ¼öµ¿ÀÛ¾÷¹× ÀϺΠÀÚµ¿Á¦¾î·Î ÃøÁ¤ Àü ÀÛ¾÷ÀÌ ¸Å¿ì ´À¸®°í, ¾î·Á¿ì¸ç, ÃøÁ¤
°æÇèÀÌ
¸¹Áö ¾ÊÀ» °æ¿ì, ÃøÁ¤Áغñ¿¡ »ó´çÇÑ ½Ã°£À» ³¶ºñÇÏ°Ô µË´Ï´Ù. ÀüÀÚµ¿¼Â¾÷ ±â¼ú AFM HEAD °³³ä µ¿¿µ»ó---> ÀüÀÚµ¿ ¼Â¾÷ ±â¼ú Àü¹ÝÀûÀÎ ¼³¸í¿¡ ´ëÇÑ µ¿¿µ»ó º¸½Ã±â ¹Ù¶ø´Ï´Ù.(http://www.aist-nt.com/products/smartspm/automation/)
2) ³î¶ó¿î ÃøÁ¤¼Óµµ¸¦ °¡´ÉÄÉ ÇÏ´Â Çõ¸íÀûÀÎ Piezo
Scanner.
»ùÇÃÀ» ¿Ã·Á³õÀ¸¸é Piezo ½ºÅ×ÀÌÁö°¡ ¿òÁ÷ÀÌ¸é¼ ½ºÄµÇÏ´Â ¹æ½ÄÀ¸·Î ºü¸£¸é¼µµ ¾ÈÁ¤ÀûÀÎ ½Ã½ºÅÛÀ» °¡Áö°í ÀÖÀ¸¸ç, SmartSPMÀº 5,10,15, 50, 70Hz ÀÌ»óÀÇ °í¼Ó ÃøÁ¤¼Óµµ¿¡µµ ½Ç¹°ÀÇ À̹ÌÁö ¿Ö°îÀÌ ¾øÀÌ ¸Å¿ì ÇØ»óµµ ³ô°Ô ÃøÁ¤µË´Ï´Ù. Ÿ°æÀï»çÀÇ °æ¿ì 1~2HzÀÇ ÃøÁ¤¼Óµµ(1~2Line scan/ÃÊ)¸¦ °¡Áö°í ÀÖ¾î ÃøÁ¤½Ã ¸Å¿ì ´ä´äÇÏ°í ´À¸³´Ï´Ù. ¸Å¿ìºü¸¥ ÃøÁ¤¼Óµµ ½Ã¿¬À» º¸½Ã±â ¹Ù¶ø´Ï´Ù.(http://www.aist-nt.com/products/smartspm/fast-scanning/) 3) ³î¶ó¿î XYÃà ÃøÁ¤¹üÀ§ÀÇ ±¤¹üÀ§È (½ºÄµ¹üÀ§ 3x3nm~5x5cm, ½ºÄ³³Ê ±³Ã¼ ¾øÀÌ!)
100 x 100 micron XYÃà ½ºÄµ³Ê°¡
±âº»ÀåÂøµÇ¾î, ÀÛ¾÷ÀÚ°¡ ¿øÇÒ°æ¿ì, 3X3nmÀÇ ¿øÀÚ±¸Á¶ ºÐ¼® ½ºÄµ¹×
½ºÆ¼Ä¡ ÀÛ¾÷¿¡ ÀÇÇÏ¿© ÃÖ´ë 50x50mm ½ºÄµÀÌ °¡´ÉÇÏ¿©, ÀÛ¾÷ÀÚ°¡ ¿øÇÏ´Â ¾î¶°ÇÑ
XYÃàÀÇ ÃøÁ¤ Å©±âµµ
Á¦¾î °¡´ÉÇÏ°Ô µÇ¾úÀ¸¸ç, ÇѰ³ÀÇ Scanner·Î ±³Ã¼¾øÀÌ ÀÌ ¸ðµç ÃøÁ¤Á¦¾î
½ÇÇö!
Ÿ°æÀï»ç´Â ÃÊÁ¤¹Ð ÃøÁ¤½Ã³ª, ´ë¸éÀû ÃøÁ¤½Ã scanner¸¦ ±³Ã¼ÇؾßÇÏ´Â Å« ºÒÆíÇÔÀÌ
ÀÖ½À´Ï´Ù.
4) ½ºÄ³³Ê°¡ ¼öÆò 7 kHz, ¼öÁ÷ 15 kHz ÀÇ °øÁøÁ֯ļö¸¦ °¡ÁüÀ¸·Î ÃøÁ¤¿¡ ´ëÇÑ
¿ÜºÎ±³¶õ¹× Áøµ¿¿¡ ¸Å¿ì ¾ÈÁ¤ÀûÀÌ´Ù.
÷´ÜÀüÀڽýºÅÛ°ú ¼ÒÇÁÆ®¿þ¾î¸¦ ¿¬°è °³¹ßÇÏ¿©
ÃøÁ¤Çػ󵵰¡ ¸Å¿ì ³ô°í,¹æÁøÅ×ÀÌºí ¾øÀ̵µ ¹æÁø¿¡ ¸Å¿ì °Çϰí,ÃøÁ¤ Á¤È®µµ °¡ ³ô¾Æ,
°í¼ÓÀÇ ÃøÁ¤»Ó
¾Æ´Ï¶ó, ¿øÀÚ±¸Á¶¸¦ ÇØ»óµµ ³ô°Ô ÃøÁ¤ ºÐ¼® °¡´ÉÇÏ´Ù.
Ÿ°æÀç»çÀÇ °æ¿ì ¼öÆò °øÁø Á֯ļö°¡ 3kHz·Î »ó´ëÀûÀ¸·Î
¿ÜºÎ±³¶õ¿¡ ¾àÇÕ´Ï´Ù.
5) 1300 nm ÀÇ IR ·¹ÀÌÀú¸¦ ÀÌ¿ëÇÏ¿© ÆÁ(Cantilever)ÀÇ ¿òÁ÷ÀÓÀ»
Àдµ¥,
ÀÌ´Â °¡½Ã±¤¼± ¿µ¿ª¿¡ ¹Î°¨ÇÑ ¹ÝµµÃ¼³ª ¹ÙÀÌ¿À Àç·á¿¡ ¿µÇâÀ» ³¢Ä¡Áö ¾ÊÀ»»Ó ¾Æ´Ï¶ó,
¿É¼Ç»çÇ×À¸·Î RAMANȤÀº FLUORESENCE SPECTROMETER ºÐ¼®°è¸¦ ÀåÂø½Ã
ÀÌ¿ëÇØ¾ßÇÏ´Â
300~600nmÆÄÀ念¿ª°ú ¿ÏÀüÈ÷ ´Þ¶ó °£¼·À» ÀÏÀ¸Å°ÁöÁö ¾Ê½À´Ï´Ù.
±×¸®°í, Çö¹Ì°æÀ¸·Î ĵƼ·¹¹öÀÇ ÃøÁ¤À§Ä¡¸¦ ãÀ»¶§, 1,300nmÀÇ IR·¹ÀÌÁ®¸¦ »ç¿ëÇϰí ÀÖÀ½À¸·Î,
Çö¹Ì°æ¿¡
½Ã°¢ÀûÀÎ °£¼·ÀÌ »ý±âÁö ¾Ê¾Æ, ºûÀÇ °£¼·À¸·Î ´«ÀÌ
±ô¹Ú°Å¸®°í Â¥Áõ³ª°Ô ÇÏ´Â À§Ä¡ ã±â ÀÛ¾÷À» ¹æÁö ÇÒ ¼ö ÀÖ´Ù.
Ÿ°æÀï»ç´Â °¡½Ã±¤¼±¿µ¿ªÀÇ ·¹ÀÌÁ®¸¦ »ç¿ëÇÏ¿© À§ÀÇ ¹®Á¦ ÇØ°áÀÌ ºÒ°¡´ÉÇÏ´Ù.
6) Á¤¹ÐÇÑ Á¦¾î¿Í ÃøÁ¤À» ÅëÇØ True
non-contact mode °¡ °¡´ÉÇÏ¿©,
Tip°ú »ùÇÃÇ¥¸é°úÀÇ °Å¸®°¡ 6~7Angstrom Á¤µµ
¶³¾îÁ®µµ Ç¥¸éÀÇ ÃøÁ¤½ÅÈ£¸¦ °·ÂÇÏ°Ô Àâ¾Æ³»¾î, True Non Contact Mode
ÃøÁ¤ÀÌ ½ÇÇöÈ µÇ¾î, TipÀÌ ºÎ·¯Áö´Â µîÀÇ ¼Õ½ÇÀ» ¸·À» ¼ö ÀÖ½À´Ï´Ù.
7) ÀÌ ¸ðµç °ÍÀ» Á¦¾îÇÒ ¼ö ÀÖ´Â controller ¶ÇÇÑ ºü¸¥ Àü¼Û ¼Óµµ¿Í Á¦¾î·Î ÀÌ
¸ðµç °ÍÀ» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù.
8) ¼±Åð¡´ÉÇÑ ¿É¼Çµé
- Magnetic external field / Electric external field
: »ùÇÃÇ¥¸é¿¡ °üÂûÇÏ°í ½ÍÀº ¹Ì¼¼ÇÑ ÀÚ±âÀû,Àü±âÀû ºÐÀÚ ±¸Á¶µéÀ» Á¤¸®ÇÏ¿© ÃøÁ¤À» ¿ëÀÌÇϰÔ
ÇÕ´Ï´Ù.
- Liquid cell set
: ¾×ü »óÀÇ »ùÇõµ ÃøÁ¤ÀÌ °¡´ÉÇÏ°Ô ÇÏ´Â µµ±¸ÀÔ´Ï´Ù.
- Áø°ø è¹ö ¾È¿¡ ¼¼ÆÃÀÌ °¡´ÉÇÑ ½Ã½ºÅÛÀ¸·Î Á¦À۵Ǿî, è¹ö¾È¿¡¼ Á¦ÀÛµÈ »ùÇÃÀ» ±×´ë·Î À̵¿ÇÏ¿©
ÃøÁ¤ °¡´ÉÇÕ´Ï´Ù.
- °í¿ÂÃøÁ¤: 250µµ¾¾±îÁö °¡¿ÇÑ »óÅ¿¡¼ ÃøÁ¤ °¡´É. ´ë±â¿Âµµº¸´Ù -5µµ ÃøÁ¤È¯°æ Á¶¼º
°¡´É
9) AFMÀ» ±¸¸ÅÈÄ ÇÊ¿ä½Ã AFM + Ramam Spectrometer °áÇÕµÈ ½Ã½ºÅÛÀ¸·Î
½±°Ô Upgrade °¡´ÉÇÏ´Ù.
AFMÀ» Á¦Á¶°øÀåÀ¸·Î ´Ù½Ã º¸³¾
ÇÊ¿ä ¾øÀÌ, AIST»çÀÇ ¿£Áö´Ï¾î°¡ »ç¿ëÀÚÃø ¿¬±¸¼Ò¸¦ ¹æ¹®ÇÏ¿© Upgrade ÀÛ¾÷ÇÕ´Ï´Ù. HORIBA, TOKYO INSTRUMENT ¾÷ü µîµîÀÇ ±âÁ¸ÀÇ RAMAN »ç¿ëÀÚÀÇ ºÐ¼®±â¸¦ AFM°ú UPGRADE ¿©ºÎ ÇùÀÇ
°¡´É
ÇÕ´Ï´Ù.
ÃøÁ¤ ¸ðµå
-Topography(3Â÷¿ø Ç¥¸é Çü»ó) - Contac AFM in air / (liquid optional) - Semicontact AFM in air / (liquid optional) - True Non-contact AFM - Phase Imaging(Ç¥¸éÀÇ ³ª³ë¹°¼ºÂ÷ÀÌ Image Mapping) - Lateral Force Microscopy(LFM) - Force Modulation - Conductive AFM (optional)-¼¼°èÃÖ°íÀÇ ÃøÁ¤Á¤¹Ðµµ, Current Range: 100fA/10microA - Magnetic Force Microscopy (MFM) - Kelvin Probe (Surfacee Potential Microscopy) - Capacitance and Electric Force Microscopy (EFM) - Force curve measurement - Nanolithography - Nanomanipulation - STM (optional) - Photocurrent Mapping (optional) - Volt-ampere characteristic measurements (optional) - NSOM(Optional) Àû¿ë»ç·Ê
- Polymer research
- Polymer-fullerene blend
- Investigation of carbon nanotubes
- Life science research
- Investigation of magnetic materials
- Nanolithography
- Material science
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GalleryBiology Materials Nanoparticles Polymers Nanolithography Test samples STM
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ÀüÈ : 02 - 3411- 0173 ÆÑ½º : 02 - 3411 - 0178
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