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¸ðµ¨ SMART SPM(Scanning Probe Microscope)

 

The world's the first 100% auotmated system

The fastest and most advance SPM.

Àü¼¼°è ÃÖÃÊ ÀüÀÚµ¿¼Â¾÷, °í¼ÓÃøÁ¤ ½ÇÇö!!!

 

  

 

                          AIST»çÀÇ È¨ÆäÀÌÁö--->

 

              ÀüÀÚµ¿¼Â¾÷ ±â¼ú AFM Head °³³ä µ¿¿µ»ó--->object_33.gif

 

AFM(Atomic Force Microscope)

 

 

 

 AFM + Raman Spectrometer --->

¸ðµ¨ OmegaScope¢â 1000

    ¹ÙÀÌ¿À, Åõ¸íÀçÁú ÃøÁ¤ºÐ¼®¿ë SPM(=AFM)--->

 
¼¼°èÃÖ°í·Î ºü¸£°í, ÀüÀÚµ¿ÀÇ Æí¸®ÇÑ AFM!!!
20³â ¸ð½ºÄÚ¹Ù¿¬±¸¼ÒÀÇ SPM±â¼ú°ú, Çõ¸íÀûÀÎ Scanner ±â¼ú·Î
AIST»ç°¡ ÃÖÁ¾Á¦Á¶¿Í ¿µ¾÷À» ¹Ì±¹¿¡¼­ »õ·ÎÀÌ Ãâ¹ß ÇÕ´Ï´Ù.
 
¹Ì±¹(SPM Á¦Á¶¿µ¾÷,¼­ºñ½ºÁö¿ø) + ¸ð½ºÄÚ¹Ù (20³â±â¼úÀÇ ¿¬±¸¼Ò) + ÀϺ» (RAMAN SPECTROMETER Á¦Á¶°ø±Þ)
3°³±¹ ÇÕÀÛ °í¼ÓÃøÁ¤ ½Å±â¼úÀÇ AIST»çÀÇ AFM
 
 
AIST»ç ȨÆäÀÌÁö : (http://www.aist-nt.com/)--³î¶ó¿ïÁ¤µµÀÇ ºü¸¥ÃøÁ¤¼Óµµ µ¿¿µ»ó, ÀüÀÚµ¿ÃøÁ¤ µ¿¿µ»ó,
                                                                       ´Ù¾çÇÑ »ùÇÃÀÇ ÃøÁ¤À̹ÌÁö,   ±â¼úÀÚ·á, īŸ·Î±×µî °Ë»ö °¡´ÉÇÕ´Ï´Ù. 
 

  

1. ¸ðµ¨ SmartSPM : ¹Ì±¹Á¦Á¶¿µ¾÷(R&D¼¾ÅÍ ¸ð½ºÄÚ¹Ù)ÀÇ Global ±â¼úÇù·ÂÀÇ AIST-NT »çÀÇ AFM

    Ç¥¸é Çü»ó ¹× Ç¥¸éÀÇ ¹°¼º ÃøÁ¤, ÀÚ±âÀû,Àü±âÀû,¸¶ÂûƯ¼ºµîÀÇ ºÐ¼®ÀÌ ±âº»ÀûÀ¸·Î °¡´ÉÇÑ ÃøÁ¤ºÐ¼®±â·Î¼­

    »ùÇÃÀåÄ¡¿Í ÃøÁ¤½ÃÀÛÀü ¸ðµç ÀÛ¾÷À»  ÀüÀÚµ¿¼Â¾÷,  °í¼ÓÀÇ ÃøÁ¤¼Óµµ,   ¿øÀÚ¹üÀ§~±¤¹üÀ§ÇÑ ÃøÁ¤¿µ¿ªÀÌ ±³Ã¼¾øÀÌ

    °¡´ÉÇÑ Çõ½ÅÀûÀΠ½ºÄµ³Ê,   Å¹¿ùÇÑ ¹æÁø¼³°è·Î,  ÇØ»óµµ¿Í À̹ÌÁö°¡ ¸Å¿ì ÁÁ½À´Ï´Ù.

 
      »ç¾ç;

        Repeatability in XY: 0.1 nm(capacitance sensor on), 0.02 nm (capacitance sensor off)

        Repeatability in Z: better than 0.04 nm

        Scan speed: XY 7kHz, Z 15kHz(unloaded)

        Maximum scan range: 100 x 100 x 15 um (+/- 10 %)

        Maximum sample size: 40x 50 x 15mm(thickness)

        Motorized positioning range: 5 x 5 mm

        Positioning resolution: 1 um

 
 
Ư¡°ú ÀåÁ¡(Ÿ°æÀï»ç¿Í ºñ±³) ;
 
1) ¸Å¿ìÆí¸®ÇÑ ÃøÁ¤Àü »ùÇà ÀüÀÚµ¿¼Â¾÷ ±â¼ú(ÀÛ¾÷ÀÚ°¡ ÃøÁ¤½ÃÀÛÀü±îÁö ¾Æ¹«°Íµµ ÇÒ °Í ¾ø½À´Ï´Ù.)
    »ùÇÃÀ» ÀåÂøÇϰí, °£ÆíÇÏ°Ô Cantilever TipÀ» ÀåÂøÇϸé, ÀÚµ¿À¸·Î Cantilever TipÀÇ ¿òÁ÷ÀÓÀÇ
    ³ô³·À̸¦ ÃøÁ¤ÇÏ´Â Laser¿Í Aligment¸¦ ÀÚµ¿À¸·Î ¸ÂÃß°í TipÀÇ »ùÇà Approaching/LandingÀÛ¾÷ÀÌ
    ÀüÀÚµ¿À¸·Î 1~2ºÐ³»¿¡ ÀÌ·ç¾îÁý´Ï´Ù. ÃøÁ¤¹× °á°ú¸¦ ÀÚµ¿À¸·Î º¸¿©ÁÝ´Ï´Ù.
    ÃøÁ¤½ÃÀÛÀü ÀÛ¾÷ÀÌ °æÀï Ÿ»ç AFM¿¡ ºñÇÏ¿© ¾à 5~10¹èÁ¤µµ ºü¸£°í ÆíÇÕ´Ï´Ù. ÀÛ¾÷ÀÚÀÇ ÁÖ°üÀûÀÎ °æÇè¿¡
    ÀÇÁ¸ÇÏÁö ¾Ê¾Æ ÃøÁ¤µ¥ÀÌÅÍÀÇ ¹Ýº¹ÀçÇö¼ºÀÌ ¿ì¼öÇÕ´Ï´Ù.
    Ÿ°æÀï»çÀÇ °æ¿ì, Àüü ¼öµ¿ÀÛ¾÷¹× ÀϺΠÀÚµ¿Á¦¾î·Î ÃøÁ¤ Àü ÀÛ¾÷ÀÌ ¸Å¿ì ´À¸®°í, ¾î·Á¿ì¸ç, ÃøÁ¤ °æÇèÀÌ

    ¸¹Áö ¾ÊÀ» °æ¿ì, ÃøÁ¤Áغñ¿¡ »ó´çÇÑ ½Ã°£À» ³¶ºñÇÏ°Ô µË´Ï´Ù.

    ÀüÀÚµ¿¼Â¾÷ ±â¼ú AFM HEAD °³³ä µ¿¿µ»ó--->object_33.gif

    ÀüÀÚµ¿ ¼Â¾÷ ±â¼ú Àü¹ÝÀûÀÎ ¼³¸í¿¡ ´ëÇÑ µ¿¿µ»ó º¸½Ã±â ¹Ù¶ø´Ï´Ù.(http://www.aist-nt.com/products/smartspm/automation/)

 

2) ³î¶ó¿î ÃøÁ¤¼Óµµ¸¦ °¡´ÉÄÉ ÇÏ´Â Çõ¸íÀûÀÎ Piezo Scanner.

    »ùÇÃÀ» ¿Ã·Á³õÀ¸¸é Piezo ½ºÅ×ÀÌÁö°¡ ¿òÁ÷À̸鼭 ½ºÄµÇÏ´Â ¹æ½ÄÀ¸·Î

    ºü¸£¸é¼­µµ ¾ÈÁ¤ÀûÀÎ ½Ã½ºÅÛÀ» °¡Áö°í ÀÖÀ¸¸ç,  SmartSPMÀº 5,10,15, 50, 70Hz ÀÌ»óÀÇ °í¼Ó ÃøÁ¤¼Óµµ¿¡µµ

    ½Ç¹°ÀÇ  À̹ÌÁö ¿Ö°îÀÌ ¾øÀÌ  ¸Å¿ì ÇØ»óµµ ³ô°Ô ÃøÁ¤µË´Ï´Ù.

    Å¸°æÀï»çÀÇ °æ¿ì 1~2HzÀÇ ÃøÁ¤¼Óµµ(1~2Line scan/ÃÊ)¸¦ °¡Áö°í ÀÖ¾î ÃøÁ¤½Ã ¸Å¿ì ´ä´äÇÏ°í ´À¸³´Ï´Ù.

    ¸Å¿ìºü¸¥ ÃøÁ¤¼Óµµ ½Ã¿¬À» º¸½Ã±â ¹Ù¶ø´Ï´Ù.(http://www.aist-nt.com/products/smartspm/fast-scanning/)

 
 
3) ³î¶ó¿î XYÃà ÃøÁ¤¹üÀ§ÀÇ  ±¤¹üÀ§È­ (½ºÄµ¹üÀ§ 3x3nm~5x5cm, ½ºÄ³³Ê ±³Ã¼ ¾øÀÌ!)
    100 x 100 micron XYÃà ½ºÄµ³Ê°¡ ±âº»ÀåÂøµÇ¾î, ÀÛ¾÷ÀÚ°¡ ¿øÇÒ°æ¿ì,  3X3nmÀÇ ¿øÀÚ±¸Á¶ ºÐ¼® ½ºÄµ¹×
    ½ºÆ¼Ä¡ ÀÛ¾÷¿¡ ÀÇÇÏ¿© ÃÖ´ë 50x50mm ½ºÄµÀÌ °¡´ÉÇÏ¿©, ÀÛ¾÷ÀÚ°¡ ¿øÇÏ´Â ¾î¶°ÇÑ XYÃàÀÇ ÃøÁ¤ Å©±âµµ
    Á¦¾î °¡´ÉÇÏ°Ô µÇ¾úÀ¸¸ç,   ÇѰ³ÀÇ Scanner·Î ±³Ã¼¾øÀÌ ÀÌ ¸ðµç ÃøÁ¤Á¦¾î ½ÇÇö!
    Ÿ°æÀï»ç´Â ÃÊÁ¤¹Ð ÃøÁ¤½Ã³ª, ´ë¸éÀû ÃøÁ¤½Ã scanner¸¦ ±³Ã¼ÇؾßÇÏ´Â Å« ºÒÆíÇÔÀÌ ÀÖ½À´Ï´Ù.
 
4) ½ºÄ³³Ê°¡ ¼öÆò 7 kHz, ¼öÁ÷ 15 kHz ÀÇ  °øÁøÁ֯ļö¸¦ °¡ÁüÀ¸·Î ÃøÁ¤¿¡ ´ëÇÑ ¿ÜºÎ±³¶õ¹× Áøµ¿¿¡ ¸Å¿ì ¾ÈÁ¤ÀûÀÌ´Ù.
    Ã·´ÜÀüÀڽýºÅÛ°ú ¼ÒÇÁÆ®¿þ¾î¸¦ ¿¬°è °³¹ßÇÏ¿©
    ÃøÁ¤Çػ󵵰¡ ¸Å¿ì ³ô°í,¹æÁøÅ×ÀÌºí ¾øÀ̵µ ¹æÁø¿¡ ¸Å¿ì °­Çϰí,ÃøÁ¤ Á¤È®µµ °¡ ³ô¾Æ,
    °í¼ÓÀÇ ÃøÁ¤»Ó ¾Æ´Ï¶ó, ¿øÀÚ±¸Á¶¸¦ ÇØ»óµµ ³ô°Ô ÃøÁ¤ ºÐ¼® °¡´ÉÇÏ´Ù.
     Ÿ°æÀç»çÀÇ °æ¿ì ¼öÆò °øÁø Á֯ļö°¡ 3kHz·Î »ó´ëÀûÀ¸·Î ¿ÜºÎ±³¶õ¿¡ ¾àÇÕ´Ï´Ù.
 
 
5) 1300 nm ÀÇ IR ·¹ÀÌÀú¸¦ ÀÌ¿ëÇÏ¿© ÆÁ(Cantilever)ÀÇ ¿òÁ÷ÀÓÀ» Àдµ¥,
    ÀÌ´Â °¡½Ã±¤¼± ¿µ¿ª¿¡ ¹Î°¨ÇÑ ¹ÝµµÃ¼³ª ¹ÙÀÌ¿À Àç·á¿¡ ¿µÇâÀ» ³¢Ä¡Áö ¾ÊÀ»»Ó ¾Æ´Ï¶ó,
    ¿É¼Ç»çÇ×À¸·Î RAMANȤÀº FLUORESENCE SPECTROMETER ºÐ¼®°è¸¦ ÀåÂø½Ã ÀÌ¿ëÇØ¾ßÇÏ´Â
    300~600nmÆÄÀ念¿ª°ú ¿ÏÀüÈ÷ ´Þ¶ó °£¼·À» ÀÏÀ¸Å°ÁöÁö ¾Ê½À´Ï´Ù.
    ±×¸®°í, Çö¹Ì°æÀ¸·Î ĵƼ·¹¹öÀÇ ÃøÁ¤À§Ä¡¸¦ ãÀ»¶§, 1,300nmÀÇ IR·¹ÀÌÁ®¸¦ »ç¿ëÇϰí ÀÖÀ½À¸·Î, Çö¹Ì°æ¿¡ 
    ½Ã°¢ÀûÀÎ °£¼·ÀÌ »ý±âÁö ¾Ê¾Æ, ºûÀÇ °£¼·À¸·Î ´«ÀÌ ±ô¹Ú°Å¸®°í Â¥Áõ³ª°Ô Çϴ À§Ä¡ ã±â ÀÛ¾÷À» ¹æÁö ÇÒ ¼ö ÀÖ´Ù.
    Å¸°æÀï»ç´Â °¡½Ã±¤¼±¿µ¿ªÀÇ ·¹ÀÌÁ®¸¦ »ç¿ëÇÏ¿© À§ÀÇ ¹®Á¦ ÇØ°áÀÌ ºÒ°¡´ÉÇÏ´Ù.
 
6) Á¤¹ÐÇÑ Á¦¾î¿Í ÃøÁ¤À» ÅëÇØ True non-contact mode °¡ °¡´ÉÇÏ¿©,
    Tip°ú »ùÇÃÇ¥¸é°úÀÇ °Å¸®°¡ 6~7Angstrom Á¤µµ ¶³¾îÁ®µµ Ç¥¸éÀÇ ÃøÁ¤½ÅÈ£¸¦ °­·ÂÇÏ°Ô Àâ¾Æ³»¾î, True Non Contact Mode
    ÃøÁ¤ÀÌ ½ÇÇöÈ­ µÇ¾î, TipÀÌ ºÎ·¯Áö´Â µîÀÇ ¼Õ½ÇÀ» ¸·À» ¼ö ÀÖ½À´Ï´Ù.
   
7) ÀÌ ¸ðµç °ÍÀ» Á¦¾îÇÒ ¼ö ÀÖ´Â controller ¶ÇÇÑ ºü¸¥ Àü¼Û ¼Óµµ¿Í Á¦¾î·Î ÀÌ ¸ðµç °ÍÀ» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù.
 
 
8) ¼±Åð¡´ÉÇÑ ¿É¼Çµé
    - Magnetic external field / Electric external field
      : »ùÇÃÇ¥¸é¿¡ °üÂûÇÏ°í ½ÍÀº ¹Ì¼¼ÇÑ ÀÚ±âÀû,Àü±âÀû ºÐÀÚ ±¸Á¶µéÀ» Á¤¸®ÇÏ¿© ÃøÁ¤À» ¿ëÀÌÇÏ°Ô ÇÕ´Ï´Ù.
    - Liquid cell set
      : ¾×ü »óÀÇ »ùÇõµ ÃøÁ¤ÀÌ °¡´ÉÇÏ°Ô ÇÏ´Â µµ±¸ÀÔ´Ï´Ù.
    - Áø°ø è¹ö ¾È¿¡ ¼¼ÆÃÀÌ °¡´ÉÇÑ ½Ã½ºÅÛÀ¸·Î Á¦À۵Ǿî, è¹ö¾È¿¡¼­ Á¦ÀÛµÈ »ùÇÃÀ» ±×´ë·Î À̵¿ÇÏ¿© ÃøÁ¤ °¡´ÉÇÕ´Ï´Ù.
    - °í¿ÂÃøÁ¤: 250µµ¾¾±îÁö °¡¿­ÇÑ »óÅ¿¡¼­ ÃøÁ¤ °¡´É. ´ë±â¿Âµµº¸´Ù -5µµ ÃøÁ¤È¯°æ Á¶¼º °¡´É
 
9) AFMÀ» ±¸¸ÅÈÄ ÇÊ¿ä½Ã AFM + Ramam Spectrometer °áÇÕµÈ ½Ã½ºÅÛÀ¸·Î ½±°Ô Upgrade °¡´ÉÇÏ´Ù.
     AFMÀ» Á¦Á¶°øÀåÀ¸·Î ´Ù½Ã º¸³¾ ÇÊ¿ä ¾øÀÌ, AIST»çÀÇ ¿£Áö´Ï¾î°¡ »ç¿ëÀÚÃø ¿¬±¸¼Ò¸¦ ¹æ¹®ÇÏ¿© Upgrade ÀÛ¾÷ÇÕ´Ï´Ù.                 HORIBA, TOKYO INSTRUMENT ¾÷ü µîµîÀÇ ±âÁ¸ÀÇ RAMAN »ç¿ëÀÚÀÇ ºÐ¼®±â¸¦ AFM°ú UPGRADE ¿©ºÎ ÇùÀÇ °¡´É
    ÇÕ´Ï´Ù.
 

 

ÃøÁ¤ ¸ðµå

-Topography(3Â÷¿ø Ç¥¸é Çü»ó)

- Contac AFM in air / (liquid optional)

- Semicontact AFM in air / (liquid optional)

- True Non-contact AFM

- Phase Imaging(Ç¥¸éÀÇ ³ª³ë¹°¼ºÂ÷ÀÌ Image Mapping)

- Lateral Force Microscopy(LFM)

- Force Modulation

- Conductive AFM (optional)-¼¼°èÃÖ°íÀÇ ÃøÁ¤Á¤¹Ðµµ, Current Range: 100fA/10microA

- Magnetic Force Microscopy (MFM)

- Kelvin Probe (Surfacee Potential Microscopy)

- Capacitance and Electric Force Microscopy (EFM)

- Force curve measurement

- Nanolithography

- Nanomanipulation

- STM (optional)

- Photocurrent Mapping (optional)

- Volt-ampere characteristic measurements (optional)

- NSOM(Optional)

 
 Àû¿ë»ç·Ê
- Polymer research
- Polymer-fullerene blend
- Investigation of carbon nanotubes
- Life science research
- Investigation of magnetic materials
- Nanolithography
- Material science
 

Gallery

Biology

Materials

Nanoparticles

Polymers

Nanolithography

Test samples

STM

 

Çѹ̻ê¾÷ 

ÀüÈ­ :  02 - 3411- 0173    ÆÑ½º :  02 - 3411 - 0178 

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